Ion Sources
Mark II Retrofit
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→Information about MARK III HO Retrofit
BeamTec presents a modern retrofit package for Veeco‘s MARK II and Mark III HO End-Hall ion source power supply. The package comprises of the new modular Kaufman & Robinson power supply system including a filament, discharge and gas controller with built-in process sequencer and an integrated MARK II compatible interface. Hollow cathode versions are supported as well by utilizing Bias and Keeper controllers instead of a filament controller.
All controllers feature advanced primary switched power modules with fast arc handling for stable operation over the complete operating range. The controllers can power both the traditional MARK II ion source or the next generation EH series of KRI products.
Four operating modes including the constant current and constant voltage mode with either constant gas or gas feedback allow for maximum versatility and fast response times on changing plasma loads. Stable process conditions are achieved within 5-10s after RUN command.
Features & Benefits
- MARK II power supply pin compatible interface
- Modular architecture
- Interface integration
- Learning mode for expedited start-up sequence
- Instant arc recovery
- Repeatable and stable ion beam parameter control over complete operating range
- Additional RS232 interfaces
- Microcontroller based logic
- CE compliance
Features & Benefits
- Plug & play installation with remote control compatibility
- Optimize upgrade for process application and cost
- All power modules are fully controlled via A/D and/or RS232 interface
- Fast control to operating parameters on startup and load changes
- Instant arc and short recovery without plasma oscillation
- Increases ion source parameters to optimize process results
- Comprehensive control via modern PLC
- High flexibility for customized features and future in-field upgrades
- Meets EMI and safety standards
Specifications
Auto Controller | ||
| Gas flow | 1 - 20/50/100/100 sccm (4 channels); 24V I/O für positive shut-off | |
| Interfaces | - 25 pin MARK II compatible, optoisolated interface - 37pin A/D interface for extended control functionality - RS485 interfaces to KRI modules - 4x; 15 pin MFC channel (Brooks 5850E compatible) - RS232/RS485 (for host control and data logging) - System interlock | |
| Dimensions | 19", 1U, 4kg | |
Filament Controller | ||
| Max. power | 900 W | |
| Max. Output | primary switched 36 VAC low frequency; 25A | |
| Interfaces | - 25 pin A/D - RS232/RS485 | |
| Dimensions | 19", 1U, 5kg | |
Discharge Controller | ||
| Max. Power | 1 kW (DC3005) | 2 kW (DC30010) |
| Max. Output | 5 A / 300 V | 10 A / 300 V |
| Interfaces | - 25 pin A/D - RS232/RS485 | - 25 pin A/D - RS232/RS485 |
| Dimensions | 19", 1U, 7 kg | 19", 1U, 7 kg |