Ion Sources
Mark III HO Retrofit
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→Information about MARK II Retrofit
BeamTec presents a modern retrofit package for Veeco‘s MARK II and MARK III HO end-Hall ion source power supply with hollow cathode neutralizer. The package comprises of the new modular Kaufman & Robinson power supply system including a discharge, bias, keeper and gas controller with built-in process sequencer and an integrated 37pin MARK III compatible interface.
All controllers feature advanced primary switched power modules with fast arc handling for stable operation over the complete operating range. The controllers can power both the traditional MARK II / Mark III ion sources or the next generation eH series of KRI products.
Four operating modes including the constant current and constant voltage mode with either constant gas or gas feedback allow for maximum versatility and fast response times on changing plasma loads. In AUTOSEQUENCE Mode the hollow cathode starts automatically before the anode is switched on.
Features
- MARK III power supply pin compatible interface
- Modular architecture
- Interface integration
- Learning mode for expedited start-up sequence
- Instant arc recovery
- Repeatable and stable ion beam parameter control over complete operating range
- Additional RS232 interfaces
- Microcontroller based logic
- CE compliance
Features & Benefits
- Plug & play installation with remote control compatibility
- Optimize upgrade for process application and cost
- All power modules are fully controlled via A/D and/or RS232 interface
- Fast control to operating parameters on startup and load changes
- Instant arc and short recovery without plasma oscillation
- Increases ion source parameters to optimize process results
- Comprehensive control via modern PLC
- High flexibility for customized features and future in-field upgrades
- Meets EMI and safety standards