Electron Beam Evaporators
UHV Evaporators
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BeamTec provides UHV evaporators with a variety of crucible volumes and power classes. Only UHV compatible components are used in the design for this kind of evaporators.
Small Single Hearth EvaporatorEB1Nano-UHV
The small 4kW evaporator with max. 4 cm³ crucible volume is equipped with a permanent magnet system for the primary deflection as well as an electromagnetic coil system for the two-dimensional, dynamic deflection of the electron beam. The ISO63CF mounting flange incorporates all media feedthroughs like high voltage, magnet current and water.
Max. Operating power 4 kW
High voltage range 6-8 kV
Coil deflection current (x/y) +/-2 A
Mounting ISO63K or ISO63CF
Crucible volume
1 x 4 cm³
Single Hearth Evaporator EBS6-xx-UHV
The small evaporator is availble for pocket sizes 4, 7 and 15 cm³. With a rated power of 6 kW this unit can operate in a wide range of applications.
Max. Operating power 6 kW
High voltage range 5 – 10 kV
Coil deflection current (x/y) +/- 1 A
Mountingoptional on CFF
Typical Crucible volume
1 x 4 cm³ (-04)
1 x 7 cm³ (-07)
1 x 15 cm³ (-15)
Single Hearth Evaporator EBS15-xxx-UHV
The large evaporator can be equipped with a maximum pocket volume of 100 cm³. With an operating power of up to 15 kW it is specialized for the use in metallization system or applications which require large capacity of the evaporant.
Max. Operating power 15 kW
High voltage range 5 – 10 kV
Coil deflection current (x/y) +/- 1 A
Mountingoptional on CFF
Typical crucible volume
1 x 25 cm³ (-025)
1 x 40 cm³ (-040)
1 x 100 cm³ (-100)
Multi Hearth Evaporator EBL6-xxx-UHV
The linear UHV multi hearth evaporator EBL6-UHV enables evaporation of up to 6 different materials without breaking vacuum. All utilites are installed on a horizontally mounted ISO160CF flange.
Max. Operating power 6 kW
High voltage range 5 – 10 kV
Coil deflection current (x/y) +/- 1 A
Mounting ISO160CF / ISO200CF incl. HV-, magnet,- water- and shutter-feedthrough
Typical crucible volume
5 x 4 cm³ (-504) 7 x 4 cm³ (-704)
4 x 7 cm³ (-407) 6 x 7 cm³ (-607)
3 x 15 cm³ (-315) 4 x 15 cm³ (-415)
| EB1Nano-UHV | EBS6-xx-UHV | EBS15-xxx-UHV | EBL6-xxx-UHV | ||
|---|---|---|---|---|---|
| Max. operating power | 4 kW | 6 kW | 15 kW | 6 kW | |
| High voltage range | 6 - 8 kW | 5 - 10 kV | |||
| Coil deflection current (x/y) | ± 2 A | ± 1 A | |||
| Mounting | ISO63K or ISO63CF | optional on CFF | optional on CFF | ISO160CF / ISO200CF incl. HV-, Magnet,- Water- and Shutter-Feedthrough | |
| Pocket rotation | - | - | - | manual / (motorized optional) | |
| Typ. crucible volume | 1 x 4 cm³ | 1 x 4 cm³ (-04) 1 x 7 cm³ (-07) 1 x 15 cm³ (-15) | 1 x 25 cm³ (-025) 1 x 40 cm³ (-040) 1 x 100 cm³ (-100) | 5 x 4 cm³ (-504) 4 x 7 cm³ (-407) 3 x 15 cm³ (-315) | 7 x 4 cm³ (-704) 6 x 7 cm³ (-607) 4 x 15 cm³ (-415) |
We are happy to send you up-to-date product information on request viainfo(at)beamtec.de.